NFI - W series horizontal magnetron sputtering coating production line
Our specification can make as client requirement
Outline
This whole line contain tree machine (1)NFI-W-0612 glass washing machine
(2)NFI-W-0612 magnetron sputtering coating production line
(3)NFI-W-0612glass leaching paint machine
Level magnetron sputtering coating production line method on glass film,
widely used in a variety of architectural glass coating system, the electronics
industry IT0 transparent conductive glass, cabinets, decorative glass and a highly
reflective mirror.
The company uses advanced magnetic coating technology in Europe and America,
combined with the actual situation, the development of innovation and introduction
of high-grade aluminum mirror coating production line, allowing users to
comprehensively improve the competitiveness of many in the variety, quality,
efficiency, scale, high technology, and automation. And is equipped with PLC and
touch screen or industrial computer to achieve automatic control, to provide
customers with high-quality low -cost products.
Basic technical parameters:
Product Features:
< >feeding stationThe glass can be supplied manually loaded roller conveyor or automatic loading
systems.
< >Entrance washing machineIn order to obtain a high fastness, no pinholes, uniform high-quality bright
color film layer, two sets of vertical washing machines provided washing brush,
cleaning brush three groups, two groups of tap water, rinsed with deionized water
two groups and four wind knife drying mechanism, especially the glass clean.
- entrance waiting room
Cleaned glass saved here waiting for entrance lock chamber to accept given
signal. Keep waiting room with a little pressure to prevent dust from entering the air.
- entrance lock chamber
Substrate quick entrance into the waiting room by the entrance lock chamber,
a vacuum pump to 1Pa high pumping speed of the vacuum system from the room.
- Entrance buffer chamber
Inlet buffer chamber as an inlet lock chamber and the transition between the
sputtering chamber, the degree of vacuum between 1Pa to l-1Pa.
- sputtering chamber
The sputtering chamber can be divided into a plurality of chambers identical
structures, each one a target chamber is attached, the process between the
chamber and the gas chambers are well isolated. Depending on the process
requirements, each target chamber and process gas can be arbitrarily replaced.
When the glass substrate through the target, the glass surface coated with a
monolayer or multilayer film.
- exit buffer chamber
Good plated substrate from the buffer chamber into the outlet lock chamber
quickly.
- exit lock chamber
When the chamber vacuum up to 1Pa above buffer chamber and locking
compartment valve opens, the substrate quickly lock chamber to give as gifts. After
the valve automatically closes, the room quickly deflated to 105Pa, locked room and
wait for the next feeding station-valve opens, the substrate quickly sent.
- Export waiting room
Glass saved here waiting to enter the export washing machine.
- Online Laboratory
Measuring optical system by a group of light source system and a set of on-line
measurement of coated glass transmissivity and reflectivity.
- unloading station
Unloading station can be equipped with manual unloading mechanism to
automatically unloading equipment.
- magnetron sputtering power
The use of advanced power technology, the sputtering process is very stable,
with automatic protection and automatic reset function.
- The electronic control system
Using two host computers and PLC systems important process parameters of
the system to dynamically control and display, alarm and report printing.
Multi-channel optical monitoring device on the production line were associated with
computer networking, automatic color measurement, measuring film thickness.
NFI - W - 0612 magnetron sputtering coating production line
A: Machine structure:
The machine is made of glass washing machines, vacuum chambers, vacuum systems,
pneumatic systems, power, sputtering cathode system, pouring paint machine, film
thickness monitoring and automatic control systems.
Vacuum system consists of slide valve pumps, Roots pumps, diffusion pumps, valves
and piping components.
Washing machine has four vertical roller brush scrubbing and groups, tap water and
deionized water washing, air knife drying excess water, the machine running speed is
1.3 to 5 m / min (adjustable), a cathode cooling is indirect cooling water, mainly metal
cathode target, for example: chromium, stainless steel, titanium and aluminum.
Two: NFI-W-0612 glass washing machine main technical parameters;
- can be cleaned glass maximum size: 1830x1200mm, the minimum
size: 400x600 mm , glass thickness of 1.3 to 10 adjustable.
- the workpiece speed: 1-5 m / min (adjustable).
- the total power: 30KW.
- covering: 10 m.
- the cleaning roller shaft portion glass delivery for the whole roller, with a gear
drive transmission; variable speed motor drive, the speed range of 1 to 5 m / min.
- brush cleaning
Pre-wash: a roll-shaped brush and two groups stand whipsaw type brush, brush diameter
disc type ^ 200mm, two rows are arranged by product type; the whole disc type brush
vertically movable to accommodate different thicknesses of glass, while can be elevated
to a certain height and easy maintenance.
Roller wash: 6 roll-shaped brush, roller-shaped brush to clean the glass surface
dirt. Roller-shaped brush of the overall structure.
water system: water pump for circulating pumps and stainless steel tanks with 2 sets;
can pull it out of the water tank cleaning; water pipes are stainless steel tube.
- the glass surface in addition to water
With two high_pressure blow off the cold surface of the glass tube a lot of water; the
remaining traces of water vapor with a hot air dryer, air temperature at 40 ~ 60 °C ;
fan 15KW one table with the filter box.
- the control system
Electrical control components and circuit breakers and contactors Schneider Chint brand
selection. Delta inverter speed, each segment can be individually segmented drive motor
control. Motor control circuit overload, phase, short circuit protection features to
ensure safe and reliable operation of the machine.
- made of stainless steel plate bending Pelton.
- stainless steel does not maintain the original painting metallic surface; the
remaining surfaces or spray paint.
Three: NFI-W-0612 magnetron sputtering coating production line
After the buffer chamber 4140 X 2760 X 323mm carbon steel 1 set
After the lock chamber 4140 X 2760 X 200mm carbon steel 1 set
4 sets of vacuum lock (Leybold structure)
Side and down the rack with two sets of car
- unit configuration
KT-320 diffusion pump 20 (Shenyang real dragon) RT0-1200 Roots pump 2 (Shanghai Crafts
Man) RT0-600 Roots pump 1 Taiwan (Shanghai Crafts Man) H-150 rotary piston pump 7 units
(Zhejiang pump)
- the target structure planar target structure. 100KVA.4 DC power supply units, drive
to the left of the target before the target opening off target.
- 3 sets of gas control system, mass flowmeter 4 sets, can be washed argon, oxygen
quantitative control. Each branch of the need to adjust the manual control valve.
- the transmission mechanism 7 sets, imported Delta inverter 1.5KW / Taiwan.
- the electrical circuit breaker and contactor control element selection Schneider
Chint brand. Mitsubishi PLC programmable controller produced 1, photoelectric switches,
Delta converter, each segment can be individually segmented drive motor control. Manual,
semi-automatic control (target regulation, inflated manually adjusted). External
10-inch color touch screen, a Taiwanese film. Low vacuum gauge,, 2 sets before lock
chamber. 2 sets of complex high vacuum gauge, production room, front and rear buffer
chamber.
Four, NFI-W-0612glass leaching paint the main technical parameters
2 m transition section, 18 meters after the drying section, the insulation segment 6
m, 10 m fan cooling section, manually showings station three meters.
6, the main structure and principle
,shower head parts
The key components shower head body made of high-strength aluminum alloy casting,
blade made of high quality steel by grinding processing, sub-heads fixed and movable
parts, a fixed part of a group equipped with fine adjustment screw for adjusting the
film uniformity; movable parts is available upon request at any time scheduling paint
thickness, active part of the hand wheel adjustment.
,lose paint pump system
Lose paint pump submersible centrifugal pump impeller for large-size, low-speed
form, in order to reduce the generation of bubble impeller speed operation, the output
from the valve control the amount of paint, lacquer inflow shower head and mouth with
a filter.
,glass leaching paint delivery system
Glass leaching paint selection of imported flat conveyor belt conveyor,
three-phase AC motor via a conveyor belt reduction drive, the entire drive system for
the belt drive, with reinforced glass smooth delivery process, frequency control motor
speed, with speed stability flexible adjustment and so on.
, oven segment
Heating box divided into two groups control, when the actual heating temperature
at or above a temperature limit, wherein a set of automatically closed; when the actual
heating temperature at or above the upper limit set temperature, the two groups are
automatically closed.
,drying sections
Drying sections using industrial exhaust fan to dry cooling.
,electronic control systems: electrical components Schneider and Chint Famous
election. Leaching paint LG inverter section with two-speed control.
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